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Hands-on design training for MultiMEMS
D. Lapadatu and P. Ohlckers

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| 8.5 Files

| 8.5.1 Layout with emptied cells

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MPW_WATER_FLOW_SENSOR_EMPTY.tdb
MPW_WATER_FLOW_SENSOR_EMPTY.gds

| 8.5.2 Glass etch help cells

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MPW_ASSIST_CORNER_TOPG_308.gds
MPW_ASSIST_CORNER_BOTG_308.gds

| 8.5.3 Finished design

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MPW_WATER_FLOW_SENSOR.gds
MPW_WATER_FLOW_SENSOR.tdb

| 8.5.4 Blank MultiMEMS file

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MultiMEMS_LEdit.tdb

| 8.5.5 Resistor 8k

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Resistor8k.tdb
Resistor8k.gds

| 8.5.6 Bottom glass hole

| 8.5.7 MultiMEMS seup file for LayoutEditor

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MultiMEMS_setup_files.layout

| 8.5.8 Through hole

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THROUGH_HOLE.tdb
THROUGH_HOLE.gds

| 8.5.9 Hierarchial design

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ResistorAssemblyFinished.gds
ResistorAssemblyFinished.tdb

| 8.5.10 Pressure sensor

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PRESS_SENS.tdb
PRESS_SENS.gds

| 8.5.11 Venturi channel

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THROUGH_HOLE_AND_CHANNEL.tdb
THROUGH_HOLE_AND_CHANNEL.gds

| 8.5.12 Glass etching

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BACKSIDE_GLASS.tdb
BACKSIDE_GLASS.gds
TOPSIDE_GLASS.tdb
TOPSIDE_GLASS.gds

| 8.5.13 PowerPoint slides for this hands-on session

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MultiMEMS_hands-on_session-June2008.ppt

| 8.5.14 Presentation on stress and strain

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Stress and strain in beams and membranes.ppt

| 8.5.15 SUBS_CONTACT

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6X6B_SUBS_CONTACT.tdb
6X6B_SUBS_CONTACT.gds

| 8.5.16 MultiMEMS bulk etch calculator

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MultiMEMS BulkEtchCalculator.xls

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STIMESI training on MULTIMEMS |
Last updated: June. 2009 24.06.2009