Challenge: Glass Etch

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Hands-on design training for MultiMEMS
D. Lapadatu and P. Ohlckers

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| 7.2 Challenge: Glass Etch

A this point you should know enough about the layers, glass etching and the geometry to finish the design.
In the cells
Start with the cell '6X6_B BACKSIDE_GLASS' where the centre position of the holes in the glass, the pressure sensor and the holes through the silicon wafer is indicated.
In the top side glass cell, named ' 6X6B_TOP_SIDE_GLASS', only the outline of the cell is given, and thus requires a bit more planning.

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Last updated: June. 2009 24.06.2009