Step-by-step LayoutEditor

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Hands-on design training for MultiMEMS
D. Lapadatu and P. Ohlckers

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| 2.2 Step-by-step LayoutEditor

Open a new layout file and set up the layers | Open LayoutEditor. If you haven't installed it, a copy can be downloaded from http://layout.sourceforge.net/ . Via the menu 'Utilities- >Macros- >Execute macro', run the macro to set up the layers for the MultiMEMS process. |

Make a new cell and name it ’Resistor 8k’

- Via the menus 'Cell- >New cell' and 'Cell- >Cellname' make a new cell and set the name to 'Resistor 8k'

Draw a rectangle on the SURES layer

- Select the layer 'SURES' from the 'Layer- >SURES- >Active' menu.
- Use the BOX tool to draw and arbitrry sized rectangle in the window.
- Select the box, and resize it according to the dimensions described in Starting point . Please note that if you center the resistor around the origin, it will save you a lot of work later. A well thought positioning of the geometries simplify accurate positioning of cells later (See Assignment 2:Hierarchal design )
- Use the menu 'Zoom- >Fit all' to zoom in

Add SUCON contacts at each end

- Switch to the SUCON layer
- Add a 8 X 8 micron square at both ends of the SURES rectangle
- When drawing a square, keep an eye on its dimension in the status bar at the bottom left corner of the application window.
- Extend the SURES rectangle 6 microns into the SUCON squares by selcting the SURES rectangles and change the dimensions accordingly.

Your design should now look like this |

Embed everytning in NOBOA and NOSUR rectangles according to the design rules

- Select the NOBOA layer
- Add a rectangle that overlaps all exiting geometries with 5 micron
- Select the NOSUR layer
- Add a rectangle that overlaps the NOBOA rectangle with 1 micron

Your resistor should now look like this |

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STIMESI training on MULTIMEMS |
Last updated: June. 2009 24.06.2009