Step-by-step L-edit

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Hands-on design training for MultiMEMS
D. Lapadatu and P. Ohlckers

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| 2.1 Step-by-step L-edit

Open a new layout file and set up the layers

- Open L-edit and close the default file it opens with.
- Open a new file via the menu 'File- >Open' as illustrated.

- Browse to the setup file. If you don't have one, it can be downloaded from http://www.multimems.com/Downloads/Downloads.htm .
- Press OK

Make a new cell and name it ’Resistor 8k’

- Via the menu 'Cell- >New', make a new cell.
- Via 'Cell- >Rename', set the name to 'Resistor 8k'.

Draw the resistor rectangle on the SURES layer

- Select the SURES layer in the pull down menu.
- Select the BOX drawing tool and draw a rectangle of about the right size anywhere in the new cell.

- Follow the tool guide to draw an arbitrary sized rectangle in an arbitrary location
- Select the rectangle(see tool guide how to do this)
- Edit it’s size and location by clicking menu: ’EditàEdit Object(s)’
- Set propeties as shown. Please note that if you center the resistor around the origin, it will save you a lot of work later. A well thought positioning of the geometries simplify accurate positioning of cells later (See Assignment 2:Hierarchal design )
- Press ’OK’
- Press the ’Home’ button on your keyboard to zoom and center geometry on screen

Add SUCON contacts at each end

- Select layer ’SUCON’ or ’Surface conductors’
- With BOX drawing tool selected, add a square of size 8x8 µm on each end
- Your design should now look like below (colors might differ!)

- To ensure electrical contact, the SURES rectangle is to be extended 6 µm into SUCON
- Select the SURES rectangle by pressing the mouse button according to the tool guide
- Bring the pointer to the short edge, and press and hold the ’Edit’ button on the mouse(see tool guide. Centre button indicated in the Figure).
- Drag the edge into the SUCON region until the length is 38. Dimensions can bee seen in status line in the bottom left corner

Your design should now look like this

- Press the ’Home’ button on your keyboard
- Extend the other end as well
- Zoom in and out by pressing ’+’ and ’-’ on your keyboard.
- Use keyboard arrows to navigate

Embed everytning in NOBOA and NOSUR rectangles according to the design rules

- Select the NOBOA layer
- Draw a rectangle from the topmost left SUCON corner to the bottommost right corner.
- Select the NOBOA rectangle(see status line)
- Press ’b’ for boolean on your keyboard(Alt: ’DrawàBoolean’)
- Fill in the fields as shown
- Press ’OK’
- Repat operation with NOSUR and 6 Microns
- Result is shown to the right

Save the file. Assignment finished

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STIMESI training on MULTIMEMS |
Last updated: June. 2009 24.06.2009